Layer
- Name
- thin film
- Type of layer
- compact
- Thickness
- 84.0 $\pm$ 0.1 $nm$
- Texture
- compact fine grained
- Type of porosity
- without pores
- Porosity
- 0.0e+00 $\pm$ 0.05
- Density
- 0.93 $\pm$ 0.02 $g.cm^{-3}$
- Formation mode
- single gas deposition
- Temperature
- 150.0 $\pm$ 1.0 $K$
- Rate
- 23s
- Fluid pressure
- 2.0e-10 $mbar$
- Comments
- thin film deposited under vacuum from flow of H2O gas (150K) with one deposition tube at 90° incidence