Sample
Name
CH4 crystalline II - film 0.275µm
Date
1995-04-25
Thickness
0.275 0.005
Diameter
20000.0
Volume
86000000.0
Substrate material
CsI
Substrate comments
window 2mm thick
Comments
Thin film - 1st deposition
Temperature
15.0 0.5
Temperature max
15.0 0.5
Comments
heating from 15K to 38K
Type
vacuum
Fluid pressure
1.0e-12 1.0e-12
Comments
residual UHV vacuum gases
Title
Formation of CH4 solid phase

Precursors

Matters

Produced sample

Sample
CH4 crystalline II - film 0.275µm (this sample)
Processing steps
Step Chronology Date Type Process Changes
#1 during layer formation 1995-04-25 layer formation CH4 gas (300K - 10 mb) deposition at 15K under vacuum from gas to solid phase